| Specification | S-4800-I |
| Vintage | |
| E-beam Resolution | 1nm @15kV / 1.4nm @1kV |
| Stage | 5 Axis, Manual |
| Stage Travel | 25 x 25 mm |
| Z, R | 30mm, 360 deg |
| Tilt | -5- +70 |
| Sample Entry | LL - 100mm |
| Chamber View | |
| OS | Win XP Pro |
| Vacuum | Turbo |
| EDX | Optional |
| BSE | Optional |
| STEM | Optional |
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