Correlation parameter:
| Project | Describe |
| SE resolution | 3.0nm (30kV)，High vacuum mode / 10nm (3kV), High vacuum mode |
| BSE resolution | 4.0nm (30kV)，Low vacuum mode |
| Magnification | x5 ~ x300,000 |
| Accelerating voltage | 0.3 ~ 30 kV |
| Low vacuum range | 6 ~ 270 Pa |
| Maximum sample size | diameter200mm |
| Sample stand | I type II type |
| X | 0 ~ 80mm 0 ~ 100mm |
| Y | 0 ~ 40mm 0 ~ 50mm |
| Z | 5 ~ 35mm 5 ~ 65mm |
| R | 360o 360o |
| T | -20o~ +90o -20o ~ +90o |
| T | -20o~ +90o -20o ~ +90o |
| Maximum sample height | 35mm (WD=10mm) 80mm (WD=10mm) |
| Drive type | Manual Five axle motor drive |
| Filament | Centered cartridge filament |
| Objective aperture | Movable 4 hole objective lens light bar |
| Gun bias | Fixed proportional bias, manual bias, and automatic 4 bias |
| Detector | The two electronic detector of high sensitivity semiconductor backscattered electron detector |
| Analysis position | WD=10mm, TOA=35o |
| Control | Mouse, keyboard, manual knob |
| Automatic adjustment | Automatic filament saturation, automatic 4 bias, automatic gun of automatic beam setting, automatic alignment, automatic focusing astigmatism, automatic brightness contrast |
Detailed description
1. S-3400N has powerful automatic functions, including automatic filament saturation, 4 bias, automatic gun centering, automatic beam setting, automatic centering, automatic focusing and astigmatism elimination, automatic brightness contrast, etc.
2. At 3kV low acceleration voltage, 10nm resolution is guaranteed.
3. A novel 5 segmented high sensitive semiconductor backscatter probe.
4. S-3400N II has a five axle motor table with an inclination angle of -20 degrees ~+90 and a sample of up to 80mm.
5. The sample bin can be fitted with EDX, WDX and EBSD at the same time.
6. The vacuum system uses a turbine molecular pump that is clean and efficient