| Specification | S-4800-II |
| Vintage | |
| E-beam Resolution | 0.4nm @30kV / 1.6nm @1kV |
| Stage | 5 Axis, Motorized |
| Stage Travel | +/- 3.5mm, +/- 2 mm |
| Z, R | +/-0.3mm |
| Tilt | +/-40 deg |
| Sample Entry | Side entry goniometer |
| Chamber View | |
| OS | Win XP Pro |
| Vacuum | Turbo |
| EDX | Optional |
| BSE | Optional |
| STEM | Optional |
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