新型肖特基场发射扫描电镜SU7000

新型肖特基场发射扫描电镜SU7000
－可获得样品的各种信息，实现高通量分析－

肖特基场发射扫描电镜SU7000，它缩短了通过采集多种信号获取样品多种信息的时间，真正实现了高通量的观察与分析。

                                             SU7000外观图

 
    扫描电子显微镜（SEM）可通过检测样品激发出的二次电子、背散射电子、X射线等信号，获得从微细结构到组成成分等各种信息，因此被广泛应用于纳米技术、半导体、电子器件、生物、材料等诸多领域。随着SEM的应用范围在不断扩大，对观察时间的缩短、信号的迅速高效采集提出了更进一步的需求。
   SU7000采用全新设计的探测器，使得对二次电子信号、背散射电子信号的检测以及分离能力大大提升。以前我们要根据获得的信号来调整样品与透镜之间的距离（工作距离／以下简称WD），以设置合适的观察与分析条件，而SU7000通过新研发的样品仓以及检测器系统，可在不改变WD的条件下更高效地接收各种信号，缩短了样品观察和分析的时间，提高了测试效率。
    而且，SU7000还配置了可同时6通道显示界面（前代机型只能同时显示4通道），进一步升级SEM控制系统，大幅提高了信号获取速度，由此实现了样品的高通量观察。
    它还标配超大样品仓，增设了附件接口，可适用于各种样品的观察与分析。
日立高新技术将在8月5日（星期日）～8月9日（星期四）在美国马里兰州举办的“Microscopy & Microanalysis”及9月5日（星期三）～9月7日（星期五）在幕张展示中心（千叶县千叶市）举办的“JASIS 2018”上展示这款SU7000，预计每年全球销量有望达150台。


【主要特点】
1．在相同WD的条件下，可同时实现二次电子、背散射电子观察与X射线分析
2．最多可同时实现6通道检测与显示
3．在高像素10,240 x 7,680时，也可获得图像数据
4．同级别*设备中最多的可配置18个附件接口
5．支持最低300Pa的低真空模式（选配）
*空间分辨率在1 nm/1 kV以下

【主要规格】

Key Concept

1. Versatile Imaging Capability
   The SU7000 excels in fast acquisition of multiple signals to address expansive SEM needs, from imaging a wide field of view to visualizing sub-nanometer structures and everything in between.
    The incorporation of newly designed electron optics and detection systems allows for efficient simultaneous acquisition of multiple secondary electron and back-scattered electron signals.
2. Multi-Channel Imaging
   The number of the detectors mounted on the SEM is ever increasing, along with the need to display all collected information effectively.
    The SU7000 is capable of processing, displaying, and saving up to 6 signals simultaneously to maximize information acquisition.
3. Wide Variety of Observation Techniques
   The specimen chamber and the vacuum system are optimized for:
   ・Large specimen size
   ・Sample manipulation at various axes
   ・Variable pressure conditions
   ・Cryogenic conditions
   ・Heating and cooling in-situ observation
4. Microanalysis
   The electron gun is equipped with a Schottky emitter that provides up to 200 nA beam current to accommodate various microanalysis applications.
    The specimen chamber and port layout are designed to incorporate multiple analytical options including EDX, WDX, EBSD, cathodoluminescence, and more.
    The SU7000 with the combination of numerous analytical accessories unifies multi-discipline techniques in a single platform.

Imaging Performance

Enhanced Information Acquisition

Single-Scan Multi-Signal Imaging

Simultaneous image acquisition for surface micro-structural information (UD), surface coating (MD), and overall topographic information (LD). Acceleration voltage: 1 kV

Intuitive Graphical User Interface

Enhanced Signal Display

• Customizable display modes.
• Single and Dual-monitor configurations.
• Simultaneous image display up to 4-ch (single) and 6-ch (dual).
• Chamber Scope and SEM MAP for optical stage navigation.

Highly Flexible Screen Layout

The software is capable of display 1, 2, or 4 signals including the chamber scope or SEM MAP on a single monitor.
Additionally, the operation panel can be customized to display submenus anywhere on the screen.

Dual Monitor

The first monitor can be used as a dedicated image display while the second monitor is utilized for operation.
Five detector images (UD, LD, UVD, MD, and PD-BSED) and SEM MAP of non-metallic inclusions in a steel specimen are displayed (left).
The screen shows the operation panel menu and the thumbnail image window on one screen (right).
The dual-monitor configuration supports increased productivity with expanded w

Expandable Observation and Analysis

Large specimen chamber and large stage

The specimen chamber can accommodate a tall specimen of φ 200 mm or 80 mm in height and 18 accessory ports. The large stage travels 135 mm (X) x 100 mm (Y) and can accept up to 2 kg of specimen.^(*) Large specimen or variable type of sub-stages can be easily mounted on the front-opening large stage door.

(*)at 0° tilt

Camera Navigation^(*)

Left: Picture of the sample captured by the camera equipped inside the chamber.
Right: Camera image transferred to the SEM MAP screen for navigation.

The camera navigation feature correlates an optical image to the target observation area.
The camera installed in the specimen chamber captures the specimen image at the time of specimen introduction. The image is transferred to the SEM MAP screen for a graphically driven navigation interface.
Camera navigation supports a maximum of φ 100 mm specimen.

(*)

Camera navigation function is optional

Detection System Enabling Dynamic Observation

The SU7000 supports observation under various environmental conditions. A variety of detectors ^(*) such as UVD and MD are selectable in addition to the PD-BSED for observation under low-vacuum conditions. 

Detector Selection Under Low-Vacuum Conditions
Specimen: Fiber with metallic oxide
Left: MD (Backscattered electron) image
Right: UVD (SE image)
The oxide dispersion and fiber layering state are observed respectively.

Left: Traditional PD-BSED response at the scan rate of 30 ms x 64 frames
Right: SU7000 PD-BSED image demonstrating improved response and image quality to expand in-situ observation capability