 |
| Specification | S-4700-II |
| Vintage | |
| E-beam Resolution | 1.5nm @15KV / 2.1nm @ 1kV |
| Stage | 5 Axis, Motorized |
| Stage Travel | 100 x 50 mm |
| Z, R | 30mm, 360 deg |
| Tilt | -5 - +60 |
| Sample Entry | LL - 6" - 150mm |
| Chamber View | Yes |
| OS | Win XP Pro |
| Vacuum | Turbo |
| EDX | Thermal LN2 EDS System |
| BSE | Centaurus Detector |
| STEM | Optional |